A BPNN-PID based long-stroke nanopositioning control scheme driven by ultrasonic motor
In this paper an innovative nanopositioning control scheme for different travel lengths is proposed. A commercial ultrasonic motor HR4 and its driver AB2 are employed to generate 3-mode motions (AC, Gate, and DC modes) to accommodate different travels, speeds and resolutions. For precise displacemen...
| Main Authors: | , , , , |
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| Other Authors: | |
| Format: | Journal Article |
| Language: | English |
| Published: |
2013
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| Subjects: | |
| Online Access: | https://hdl.handle.net/10356/102572 http://hdl.handle.net/10220/16864 |