A BPNN-PID based long-stroke nanopositioning control scheme driven by ultrasonic motor
In this paper an innovative nanopositioning control scheme for different travel lengths is proposed. A commercial ultrasonic motor HR4 and its driver AB2 are employed to generate 3-mode motions (AC, Gate, and DC modes) to accommodate different travels, speeds and resolutions. For precise displacemen...
Main Authors: | Cheng, Fang, Fan, Kuang-Chao, Miao, Jinwei, Li, Bai-Kun, Wang, Hung-Yu |
---|---|
Other Authors: | School of Mechanical and Aerospace Engineering |
Format: | Journal Article |
Language: | English |
Published: |
2013
|
Subjects: | |
Online Access: | https://hdl.handle.net/10356/102572 http://hdl.handle.net/10220/16864 |
Similar Items
-
Design and fabrication of a multipurpose compliant nanopositioning architecture
by: Panas, Robert M. (Robert Matthew)
Published: (2013) -
Flexure-based nanopositioning systems : integrated design and control
by: Shilpiekandula, Vijay, 1979-
Published: (2010) -
Piezoelectric MEMS Linear Motor for Nanopositioning Applications
by: Víctor Ruiz-Díez, et al.
Published: (2021-02-01) -
Design of a precise X-Y-Theta nanopositioning optical sensor
by: Johnson, Michael B. (Michael Barnet)
Published: (2010) -
Data-Driven Tuning of PID Controlled Piezoelectric Ultrasonic Motor
by: Sarah Makarem, et al.
Published: (2021-06-01)