Smart three-dimensional machine vision
Three-dimensional inspection is increasingly being demanded by industry in various sectors and none more so than in wafer fabs. While there are many three-dimensional surface measuring instruments, there is still a gap to their adoption in the industry due to lack of methodologies for measuring larg...
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| Format: | Thesis |
| Language: | English |
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2019
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| Online Access: | https://hdl.handle.net/10356/102839 http://hdl.handle.net/10220/48588 |