Digital holographic microscopy for MEMS/MOEMS device inspection and complete characterization
Digital holography became feasible since the availability of charged coupled devices (CCDs) with smaller pixel sizes, higher pixel numbers and high speed computers. Fresnel or Fourier holograms are recorded directly by the CCD and stored digitally in the computer. The reconstruction of the wavefield...
| Main Authors: | , , |
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| Other Authors: | |
| Format: | Journal Article |
| Language: | English |
| Published: |
2015
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| Subjects: | |
| Online Access: | https://hdl.handle.net/10356/103081 http://hdl.handle.net/10220/25821 http://journal.library.iisc.ernet.in/index.php/iisc/article/view/1110/1339 |