Solid source growth of Si oxide nanowires promoted by carbon nanotubes
We report a method to promote solid source growth of Si oxide nanowires (SiONWs) by using an array of vertically aligned carbon nanotubes (CNTs). It starts with the fabrication of CNT array by plasma enhanced chemical vapor deposition (PECVD) on Si wafers, followed by growth of SiONWs. Herein, CNTs...
Main Authors: | , , , , , , |
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Other Authors: | |
Format: | Journal Article |
Language: | English |
Published: |
2014
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Subjects: | |
Online Access: | https://hdl.handle.net/10356/103625 http://hdl.handle.net/10220/24540 |