Thermal flow sensor for ultra-low velocities based on printed circuit board technology
This paper presents a new thermal flow sensor for ultra-low velocities. The sensor was fabricated with the standard printed circuit board (PCB) technology. The technology and the simple sensor design would reduce costs in fabrication and packaging. A one-dimensional analytical model is presented in...
Main Authors: | , , |
---|---|
Other Authors: | |
Format: | Journal Article |
Language: | English |
Published: |
2014
|
Subjects: | |
Online Access: | https://hdl.handle.net/10356/106164 http://hdl.handle.net/10220/23963 http://dx.doi.org/10.1088/0957-0233/12/12/314 |