A polymeric piezoelectric micropump based on lamination technology
This paper presents the first micropumps assembled using polymeric lamination technology. Each pump consists of two 100 ?m thick, 10 mm diameter SU-8 discs; two 1.5 mm thick, 15 mm diameter polymethylmethacrylate (PMMA) discs; and one piezo disc. The SU-8 parts were fabricated by a two-mask polymeri...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Journal Article |
| Language: | English |
| Published: |
2014
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| Subjects: | |
| Online Access: | https://hdl.handle.net/10356/106456 http://hdl.handle.net/10220/24007 http://dx.doi.org/10.1088/0960-1317/14/4/026 |