Design optimization for an SOI MOEMS accelerometer

Design optimization for an SOI MOEMS accelerometer

With optimization being vital, the design optimization of a silicon-on-insulator (SOI) micro-opto-electro-mechanical systems accelerometer is discussed in this paper. This process has enabled a simplistic design that employs double-sided deep reactive ion etching (DRIE) on SOI wafer to be able to at...

Full description

Bibliographic Details
Main Authors: Teo, Adrian J. T., Li, Holden King-Ho, Tan, Say Hwa, Yoon, Yong-Jin
Other Authors: School of Mechanical and Aerospace Engineering
Format: Journal Article
Language:English
Published: 2019
Subjects:
Design Optimization
Accelerometer
DRNTU::Engineering::Mechanical engineering
Online Access:https://hdl.handle.net/10356/106469
http://hdl.handle.net/10220/47914

Internet

https://hdl.handle.net/10356/106469
http://hdl.handle.net/10220/47914

Similar Items