Monolithic CMOS-MEMS integration for high-g accelerometers
This paper highlights work-in-progress towards the conceptualization, simulation, fabrication and initial testing of a silicon-germanium (SiGe) integrated CMOS-MEMS high-g accelerometer for military, munition, fuze and shock measurement applications. Developed on IMEC’s SiGe MEMS platform, the MEMS...
| Principais autores: | , , |
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| Outros Autores: | |
| Formato: | Conference Paper |
| Idioma: | English |
| Publicado em: |
2015
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| Assuntos: | |
| Acesso em linha: | https://hdl.handle.net/10356/106720 http://hdl.handle.net/10220/25113 |