White light interferometer with color CCD for 3D-surface profiling of microsystems
White light interferometry (WLI) is a state-of-the-art technique for high resolution full-filed 3-D surface profiling of Microsystems. However, the WLI is rather slow, because the number of frames to be recorded and evaluated is large compared to the single wavelength phase shifting interferometry....
Main Authors: | , , , |
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Other Authors: | |
Format: | Conference Paper |
Language: | English |
Published: |
2015
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Subjects: | |
Online Access: | https://hdl.handle.net/10356/106899 http://hdl.handle.net/10220/25224 |