White light interferometer with color CCD for 3D-surface profiling of microsystems
White light interferometry (WLI) is a state-of-the-art technique for high resolution full-filed 3-D surface profiling of Microsystems. However, the WLI is rather slow, because the number of frames to be recorded and evaluated is large compared to the single wavelength phase shifting interferometry....
Main Authors: | Upputuri, Paul Kumar, Pramanik, Manojit, Nandigana, Krishna Mohan, Kothiyal, Mahendra Prasad |
---|---|
Other Authors: | School of Chemical and Biomedical Engineering |
Format: | Conference Paper |
Language: | English |
Published: |
2015
|
Subjects: | |
Online Access: | https://hdl.handle.net/10356/106899 http://hdl.handle.net/10220/25224 |
Similar Items
-
Two-wavelength microscopic speckle interferometry using colour CCD camera
by: Upputuri, Paul K., et al.
Published: (2015) -
Measurement of large discontinuities using single white light interferogram white light interferogram
by: Upputuri, Paul Kumar, et al.
Published: (2014) -
Multi-colour microscopic interferometry for optical metrology and imaging applications
by: Upputuri, Paul Kumar, et al.
Published: (2016) -
Use of two wavelengths in microscopic TV holography for nondestructive testing
by: Upputuri, Paul Kumar, et al.
Published: (2014) -
Use of two wavelengths in microscopic TV holography for nondestructive testing
by: Upputuri, Paul Kumar, et al.
Published: (2014)