A ZnO thin-film driven microcantilever for nanoscale actuation and sensing

A ZnO thin-film driven microcantilever for nanoscale actuation and sensing

Zinc oxide (ZnO) thin film as a piezoelectric material for microelectromechanical system (MEMS) actuators and sensors was evaluated. ZnO thin films were deposited using radio frequency (RF) magnetron sputtering. Process parameters such as gas ratio, working pressure, and RF power were optimized for...

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Bibliographic Details
Main Authors: Yuan, Yanhui, Shyong Chow, Kun, Du, Hejun, Wang, Peihong, Zhang, Mingsheng, Yu, Shengkai, Liu, Bo
Other Authors: School of Mechanical and Aerospace Engineering
Format: Journal Article
Language:English
Published: 2013
Subjects:
DRNTU::Engineering::Materials::Nanostructured materials
Online Access:https://hdl.handle.net/10356/107347
http://hdl.handle.net/10220/18055
http://dx.doi.org/10.1080/19475411.2012.749959

Internet

https://hdl.handle.net/10356/107347
http://hdl.handle.net/10220/18055
http://dx.doi.org/10.1080/19475411.2012.749959

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