Study of filtered cathodic vacuum arc technology and properties of tetrahedral amorphous carbon films
Cathodic vacuum arc systems have long been used to produce thin film coatings in a vacuum. However, it has been observed in the deposition of films using cathodic arc technology that the plasma beam of positive ions and electrons produced by the arc is frequently contaminated by large, typically neu...
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| Format: | Thesis |
| Language: | English |
| Published: |
2008
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| Online Access: | http://hdl.handle.net/10356/13219 |