Design of a heat flux sensor by MEMS technology

Design of a heat flux sensor by MEMS technology

The purpose of this report is to look into the design, fabrication and calibration of a heat flux sensor using MEMS technology. MEMS technology is the acronym for microelectromechanical systems, which is a spin-off from the wafer fabrication techniques of the semiconductor industry. This is a sys...

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Bibliographic Details
Main Author: Wan, Siew Ping
Other Authors: Tan, Fock Lai
Format: Thesis
Language:English
Published: 2008
Subjects:
DRNTU::Engineering::Manufacturing::Product design
DRNTU::Engineering::Electrical and electronic engineering::Microelectromechanical systems
Online Access:http://hdl.handle.net/10356/13421

Internet

http://hdl.handle.net/10356/13421

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