Design of a heat flux sensor by MEMS technology
The purpose of this report is to look into the design, fabrication and calibration of a heat flux sensor using MEMS technology. MEMS technology is the acronym for microelectromechanical systems, which is a spin-off from the wafer fabrication techniques of the semiconductor industry. This is a sys...
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| Other Authors: | |
| Format: | Thesis |
| Language: | English |
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2008
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| Online Access: | http://hdl.handle.net/10356/13421 |
| _version_ | 1826113153769930752 |
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| author | Wan, Siew Ping |
| author2 | Tan, Fock Lai |
| author_facet | Tan, Fock Lai Wan, Siew Ping |
| author_sort | Wan, Siew Ping |
| collection | NTU |
| description | The purpose of this report is to look into the design, fabrication and calibration of
a heat flux sensor using MEMS technology. MEMS technology is the acronym for
microelectromechanical systems, which is a spin-off from the wafer fabrication
techniques of the semiconductor industry. This is a system of design and fabrication
techniques that works in the dimensional range of micron and sub-micron and it
involves expertise in electronic, electrical, chemical, and mechanical field. The
micro thermal sensor measuring heat flux is designed based on thermocouple
principle and is configured as a large circular thermopile. By using the design and
fabrication techniques of MEMS technology, the large thermopile consisting of
various thin-film layers can be contain in a small volume, making it possible to have
a micro-sensor. |
| first_indexed | 2024-10-01T03:18:53Z |
| format | Thesis |
| id | ntu-10356/13421 |
| institution | Nanyang Technological University |
| language | English |
| last_indexed | 2024-10-01T03:18:53Z |
| publishDate | 2008 |
| record_format | dspace |
| spelling | ntu-10356/134212023-03-11T17:28:09Z Design of a heat flux sensor by MEMS technology Wan, Siew Ping Tan, Fock Lai School of Mechanical and Production Engineering DRNTU::Engineering::Manufacturing::Product design DRNTU::Engineering::Electrical and electronic engineering::Microelectromechanical systems The purpose of this report is to look into the design, fabrication and calibration of a heat flux sensor using MEMS technology. MEMS technology is the acronym for microelectromechanical systems, which is a spin-off from the wafer fabrication techniques of the semiconductor industry. This is a system of design and fabrication techniques that works in the dimensional range of micron and sub-micron and it involves expertise in electronic, electrical, chemical, and mechanical field. The micro thermal sensor measuring heat flux is designed based on thermocouple principle and is configured as a large circular thermopile. By using the design and fabrication techniques of MEMS technology, the large thermopile consisting of various thin-film layers can be contain in a small volume, making it possible to have a micro-sensor. Master of Science (Precision Engineering) 2008-08-20T03:24:11Z 2008-10-20T08:17:03Z 2008-08-20T03:24:11Z 2008-10-20T08:17:03Z 1999 1999 Thesis http://hdl.handle.net/10356/13421 en 75 p. application/pdf |
| spellingShingle | DRNTU::Engineering::Manufacturing::Product design DRNTU::Engineering::Electrical and electronic engineering::Microelectromechanical systems Wan, Siew Ping Design of a heat flux sensor by MEMS technology |
| title | Design of a heat flux sensor by MEMS technology |
| title_full | Design of a heat flux sensor by MEMS technology |
| title_fullStr | Design of a heat flux sensor by MEMS technology |
| title_full_unstemmed | Design of a heat flux sensor by MEMS technology |
| title_short | Design of a heat flux sensor by MEMS technology |
| title_sort | design of a heat flux sensor by mems technology |
| topic | DRNTU::Engineering::Manufacturing::Product design DRNTU::Engineering::Electrical and electronic engineering::Microelectromechanical systems |
| url | http://hdl.handle.net/10356/13421 |
| work_keys_str_mv | AT wansiewping designofaheatfluxsensorbymemstechnology |