To establish a quality management system (QMS) for cleanroom wafer processes

This report presents a discussion of the details and implementation of a Quality Management System (QMS) in a cleanroom which is used for processing wafers. The implementation of the QMS was carried out in a class 10 cleanroom and a class 10,000 cleanroom in the Institute of Microelectronics (IME) w...

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Bibliographic Details
Main Author:	Mok, Hiang Teck.
Other Authors:	Spedding, Trevor Allan
Format:	Thesis
Language:	English
Published:	2008
Subjects:	DRNTU::Engineering::Manufacturing::Clean room DRNTU::Engineering::Manufacturing::Quality control
Online Access:	http://hdl.handle.net/10356/13508

Internet

http://hdl.handle.net/10356/13508

To establish a quality management system (QMS) for cleanroom wafer processes

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