Indentation crack formation and interaction on pure and metallised Si wafers

The metallization of Si represents an important industrial process and produces a bi-layered composite of a ductile metal film on a brittle substrate. The mechanical properties of such a composite are determined by the properties of the two layers and the interface and influenced by the fact that th...

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Bibliographic Details
Main Author: Su, Dan.
Other Authors: Manoharan, Mohan
Format: Thesis
Language:English
Published: 2008
Subjects:
Online Access:http://hdl.handle.net/10356/13535