Control of manufacturing systems with downstream batch processors
Batch processors can concurrently process more than one batch and are regularly used in the semiconductor manufacturing industry, particularly in the wafer fabrication stage. The reentrant nature of the wafer fab and the incompatibility of jobs from different job families, combined with the typicall...
| Main Author: | |
|---|---|
| Other Authors: | |
| Format: | Thesis |
| Language: | English |
| Published: |
2008
|
| Subjects: | |
| Online Access: | https://hdl.handle.net/10356/13611 |