A study of air molecular contamination (AMC) and volatile organic compounds (VOC) in new AMC/VOC controlled cleanroom
Airborne Molecular Contaminants (AMC) may cause different flaws on an electronic device [1]. It is especially so in the semiconductor manufacturing sector. Monitoring of AMC is becoming essential when it comes to managing cleanroom for the present production of semiconductor devices as it advances i...
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| Format: | Final Year Project (FYP) |
| Language: | English |
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Nanyang Technological University
2020
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| Online Access: | https://hdl.handle.net/10356/136645 |