Reliability study of copper wire bonding and through silicon via

Interconnects are necessary for the electrical connection of an integrated circuits (IC). Therefore, its quality and reliability are vitally important to ensure that a device is working as it is intendedly designed. The continued scaling of devices and the desire for higher functionality and capabil...

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Bibliographic Details
Main Author: Chan, Marvin Jiawei
Other Authors: Tan, Chuan Seng
Format: Thesis-Doctor of Philosophy
Language:English
Published: Nanyang Technological University 2020
Subjects:
Online Access:https://hdl.handle.net/10356/142271