Investigation of multimodal electret-based MEMS energy harvester with impact-induced nonlinearity
This paper presents an electret-based MEMS energy harvester synergizing the advantages of multi-modal structure and impact mechanism for broad operating bandwidth. The device with a volume of 295 mm3 comprises an electret-based primary subsystem for power generation and an electrode-free auxiliary s...
Main Authors: | , , , , , |
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Other Authors: | |
Format: | Journal Article |
Language: | English |
Published: |
2020
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Subjects: | |
Online Access: | https://hdl.handle.net/10356/142333 |