Investigation of multimodal electret-based MEMS energy harvester with impact-induced nonlinearity

This paper presents an electret-based MEMS energy harvester synergizing the advantages of multi-modal structure and impact mechanism for broad operating bandwidth. The device with a volume of 295 mm3 comprises an electret-based primary subsystem for power generation and an electrode-free auxiliary s...

Full description

Bibliographic Details
Main Authors: Tao, Kai, Tang, Lihua, Wu, Jin, Lye, Sun Woh, Chang, Honglong, Miao, Jianmin
Other Authors: School of Mechanical and Aerospace Engineering
Format: Journal Article
Language:English
Published: 2020
Subjects:
Online Access:https://hdl.handle.net/10356/142333
_version_ 1824454777785810944
author Tao, Kai
Tang, Lihua
Wu, Jin
Lye, Sun Woh
Chang, Honglong
Miao, Jianmin
author2 School of Mechanical and Aerospace Engineering
author_facet School of Mechanical and Aerospace Engineering
Tao, Kai
Tang, Lihua
Wu, Jin
Lye, Sun Woh
Chang, Honglong
Miao, Jianmin
author_sort Tao, Kai
collection NTU
description This paper presents an electret-based MEMS energy harvester synergizing the advantages of multi-modal structure and impact mechanism for broad operating bandwidth. The device with a volume of 295 mm3 comprises an electret-based primary subsystem for power generation and an electrode-free auxiliary subsystem for frequency tuning. The tiny auxiliary subsystem helps to induce close resonances with comparable outputs at low excitations, as well as introduces impact-based nonlinearity to drive the first resonant peak upward and further approach the second one at elevated excitations. The experimental results demonstrate that at an excitation of 12.8 m/$\text{s}^{2}$ , the 3-dB bandwidth of the first peak is increased from 20.4 to 60.4 Hz and a low frequency ratio of 1.15 between the two peaks is achieved. The two degree-of-freedom resonant structure with impact-based nonlinearity is systematically investigated through an equivalent circuit representation. An electrical equivalent circuit model of the proposed device with impact mechanism is derived. The circuit simulation confirms the nonlinear behavior of the system, and reveals the mechanism of peak shifting and bandwidth enhancing dynamics.
first_indexed 2025-02-19T03:27:43Z
format Journal Article
id ntu-10356/142333
institution Nanyang Technological University
language English
last_indexed 2025-02-19T03:27:43Z
publishDate 2020
record_format dspace
spelling ntu-10356/1423332020-06-19T04:54:04Z Investigation of multimodal electret-based MEMS energy harvester with impact-induced nonlinearity Tao, Kai Tang, Lihua Wu, Jin Lye, Sun Woh Chang, Honglong Miao, Jianmin School of Mechanical and Aerospace Engineering Engineering::Mechanical engineering 2DOF Multimodal This paper presents an electret-based MEMS energy harvester synergizing the advantages of multi-modal structure and impact mechanism for broad operating bandwidth. The device with a volume of 295 mm3 comprises an electret-based primary subsystem for power generation and an electrode-free auxiliary subsystem for frequency tuning. The tiny auxiliary subsystem helps to induce close resonances with comparable outputs at low excitations, as well as introduces impact-based nonlinearity to drive the first resonant peak upward and further approach the second one at elevated excitations. The experimental results demonstrate that at an excitation of 12.8 m/$\text{s}^{2}$ , the 3-dB bandwidth of the first peak is increased from 20.4 to 60.4 Hz and a low frequency ratio of 1.15 between the two peaks is achieved. The two degree-of-freedom resonant structure with impact-based nonlinearity is systematically investigated through an equivalent circuit representation. An electrical equivalent circuit model of the proposed device with impact mechanism is derived. The circuit simulation confirms the nonlinear behavior of the system, and reveals the mechanism of peak shifting and bandwidth enhancing dynamics. 2020-06-19T04:54:04Z 2020-06-19T04:54:04Z 2018 Journal Article Tao, K., Tang, L., Wu, J., Lye, S. W., Chang, H., & Miao, J. (2018). Investigation of multimodal electret-based MEMS energy harvester with impact-induced nonlinearity. Journal of Microelectromechanical Systems, 27(2), 276-288. doi:10.1109/JMEMS.2018.2792686 1057-7157 https://hdl.handle.net/10356/142333 10.1109/JMEMS.2018.2792686 2-s2.0-85041670179 2 27 276 288 en Journal of Microelectromechanical Systems © 2018 IEEE. All rights reserved.
spellingShingle Engineering::Mechanical engineering
2DOF
Multimodal
Tao, Kai
Tang, Lihua
Wu, Jin
Lye, Sun Woh
Chang, Honglong
Miao, Jianmin
Investigation of multimodal electret-based MEMS energy harvester with impact-induced nonlinearity
title Investigation of multimodal electret-based MEMS energy harvester with impact-induced nonlinearity
title_full Investigation of multimodal electret-based MEMS energy harvester with impact-induced nonlinearity
title_fullStr Investigation of multimodal electret-based MEMS energy harvester with impact-induced nonlinearity
title_full_unstemmed Investigation of multimodal electret-based MEMS energy harvester with impact-induced nonlinearity
title_short Investigation of multimodal electret-based MEMS energy harvester with impact-induced nonlinearity
title_sort investigation of multimodal electret based mems energy harvester with impact induced nonlinearity
topic Engineering::Mechanical engineering
2DOF
Multimodal
url https://hdl.handle.net/10356/142333
work_keys_str_mv AT taokai investigationofmultimodalelectretbasedmemsenergyharvesterwithimpactinducednonlinearity
AT tanglihua investigationofmultimodalelectretbasedmemsenergyharvesterwithimpactinducednonlinearity
AT wujin investigationofmultimodalelectretbasedmemsenergyharvesterwithimpactinducednonlinearity
AT lyesunwoh investigationofmultimodalelectretbasedmemsenergyharvesterwithimpactinducednonlinearity
AT changhonglong investigationofmultimodalelectretbasedmemsenergyharvesterwithimpactinducednonlinearity
AT miaojianmin investigationofmultimodalelectretbasedmemsenergyharvesterwithimpactinducednonlinearity