Material characterizations of high refractive films for active waveguide
The fabrication of SiON and Erbium (Er) doped SiON films have been successfully developed using the sputtering and co-sputtering techniques. The properties of the films such as the optical properties, the compositions, the chemical bonds and the microstructures, have been well characterized and s...
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| Format: | Research Report |
| Language: | English |
| Published: |
2008
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| Online Access: | http://hdl.handle.net/10356/14234 |