Electron radiation-induced material diffusion and nanocrystallization in nanostructured amorphous CoFeB thin film
Transmission electron microscopy (TEM) is widely used for physical characterization of CoFeB based magnetic tunneling junctions (MTJ) with its atomic-scale resolution. However, highly energetic electron radiation during TEM analysis may cause phase and microstructure modification of CoFeB and its as...
Main Authors: | , , , , , , , , , , , , |
---|---|
Other Authors: | |
Format: | Journal Article |
Language: | English |
Published: |
2020
|
Subjects: | |
Online Access: | https://hdl.handle.net/10356/143601 |