RF MEMs devices development for telecommunications

RF MEMs devices development for telecommunications

Radio-frequency microelectromechanical systems (RF MEMS) are highly miniaturized devices intended to switch, modulate, filter or tune electrical signal from DC to microwave frequencies. The micromachining techniques used to fabricate these components are based on the standard CMOS techniques for...

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Bibliographic Details
Main Authors: Liu, Ai Qun, Yu, Aibin, Tang, Min, Muhammad Faeyz Karim, Zhang, Xinjun, Win Palei
Other Authors: School of Electrical and Electronic Engineering
Format: Research Report
Language:English
Published: 2008
Subjects:
DRNTU::Engineering::Electrical and electronic engineering::Microelectromechanical systems
Online Access:http://hdl.handle.net/10356/14531

Internet

http://hdl.handle.net/10356/14531

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