| Summary: | Radio-frequency microelectromechanical systems (RF MEMS) are highly
miniaturized devices intended to switch, modulate, filter or tune electrical signal from
DC to microwave frequencies. The micromachining techniques used to fabricate these
components are based on the standard CMOS techniques for high-volume integrated
semiconductor circuits. RF MEMS switches are characterized by their low insertion
loss, high return loss and isolation, large bandwidth, good linearity, negligible power
consumption, low actuation voltage. In this project, new RF MEMS switches that
could play key roles in MEMS have been developed.
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