RF MEMs devices development for telecommunications
Radio-frequency microelectromechanical systems (RF MEMS) are highly miniaturized devices intended to switch, modulate, filter or tune electrical signal from DC to microwave frequencies. The micromachining techniques used to fabricate these components are based on the standard CMOS techniques for...
| Principais autores: | , , , , , |
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| Outros Autores: | |
| Formato: | Research Report |
| Idioma: | English |
| Publicado em: |
2008
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| Assuntos: | |
| Acesso em linha: | http://hdl.handle.net/10356/14531 |
| _version_ | 1826114880993755136 |
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| author | Liu, Ai Qun Yu, Aibin Tang, Min Muhammad Faeyz Karim Zhang, Xinjun Win Palei |
| author2 | School of Electrical and Electronic Engineering |
| author_facet | School of Electrical and Electronic Engineering Liu, Ai Qun Yu, Aibin Tang, Min Muhammad Faeyz Karim Zhang, Xinjun Win Palei |
| author_sort | Liu, Ai Qun |
| collection | NTU |
| description | Radio-frequency microelectromechanical systems (RF MEMS) are highly
miniaturized devices intended to switch, modulate, filter or tune electrical signal from
DC to microwave frequencies. The micromachining techniques used to fabricate these
components are based on the standard CMOS techniques for high-volume integrated
semiconductor circuits. RF MEMS switches are characterized by their low insertion
loss, high return loss and isolation, large bandwidth, good linearity, negligible power
consumption, low actuation voltage. In this project, new RF MEMS switches that
could play key roles in MEMS have been developed. |
| first_indexed | 2024-10-01T03:46:26Z |
| format | Research Report |
| id | ntu-10356/14531 |
| institution | Nanyang Technological University |
| language | English |
| last_indexed | 2024-10-01T03:46:26Z |
| publishDate | 2008 |
| record_format | dspace |
| spelling | ntu-10356/145312023-03-04T03:20:34Z RF MEMs devices development for telecommunications Liu, Ai Qun Yu, Aibin Tang, Min Muhammad Faeyz Karim Zhang, Xinjun Win Palei School of Electrical and Electronic Engineering DRNTU::Engineering::Electrical and electronic engineering::Microelectromechanical systems Radio-frequency microelectromechanical systems (RF MEMS) are highly miniaturized devices intended to switch, modulate, filter or tune electrical signal from DC to microwave frequencies. The micromachining techniques used to fabricate these components are based on the standard CMOS techniques for high-volume integrated semiconductor circuits. RF MEMS switches are characterized by their low insertion loss, high return loss and isolation, large bandwidth, good linearity, negligible power consumption, low actuation voltage. In this project, new RF MEMS switches that could play key roles in MEMS have been developed. 2008-11-27T04:16:40Z 2008-11-27T04:16:40Z 2005 2005 Research Report http://hdl.handle.net/10356/14531 en 269 p. application/pdf |
| spellingShingle | DRNTU::Engineering::Electrical and electronic engineering::Microelectromechanical systems Liu, Ai Qun Yu, Aibin Tang, Min Muhammad Faeyz Karim Zhang, Xinjun Win Palei RF MEMs devices development for telecommunications |
| title | RF MEMs devices development for telecommunications |
| title_full | RF MEMs devices development for telecommunications |
| title_fullStr | RF MEMs devices development for telecommunications |
| title_full_unstemmed | RF MEMs devices development for telecommunications |
| title_short | RF MEMs devices development for telecommunications |
| title_sort | rf mems devices development for telecommunications |
| topic | DRNTU::Engineering::Electrical and electronic engineering::Microelectromechanical systems |
| url | http://hdl.handle.net/10356/14531 |
| work_keys_str_mv | AT liuaiqun rfmemsdevicesdevelopmentfortelecommunications AT yuaibin rfmemsdevicesdevelopmentfortelecommunications AT tangmin rfmemsdevicesdevelopmentfortelecommunications AT muhammadfaeyzkarim rfmemsdevicesdevelopmentfortelecommunications AT zhangxinjun rfmemsdevicesdevelopmentfortelecommunications AT winpalei rfmemsdevicesdevelopmentfortelecommunications |