RF MEMs devices development for telecommunications
Radio-frequency microelectromechanical systems (RF MEMS) are highly miniaturized devices intended to switch, modulate, filter or tune electrical signal from DC to microwave frequencies. The micromachining techniques used to fabricate these components are based on the standard CMOS techniques for...
| Principais autores: | , , , , , |
|---|---|
| Outros Autores: | |
| Formato: | Research Report |
| Idioma: | English |
| Publicado em: |
2008
|
| Assuntos: | |
| Acesso em linha: | http://hdl.handle.net/10356/14531 |