A novel fabrication technique for three-dimensional concave nanolens arrays

A novel fabrication technique for three-dimensional concave nanolens arrays

A novel facile technique is proposed for fabricating three-dimensional (3D) concave nanolens arrays on a silicon substrate. The technique leverages an inherent characteristic of the polymethyl methacrylate (PMMA) resist during inductively coupled plasma (ICP) etching. The tendency for plasma ions to...

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Bibliographic Details
Main Authors: Duan, Tianli, Xu, Kang, Liu, Zhihong, Gu, Chenjie, Pan, Jisheng, Ang, Diing Shenp, Zhang, Rui, Wang, Yao, Ma, Xuhang
Other Authors: School of Electrical and Electronic Engineering
Format: Journal Article
Language:English
Published: 2020
Subjects:
Engineering::Electrical and electronic engineering
Concave Nanolens
Three-dimensional Lens Array
Online Access:https://hdl.handle.net/10356/145437

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