Adaptive abstraction-level conversion framework for accelerated discrete-event simulation in smart semiconductor manufacturing
Speeding up the simulation of discrete-event wafer-fabrication models is essential for fast decision-making to handle unexpected events in smart semiconductor manufacturing because decision-parameter optimization requires repeated simulation execution based on the current manufacturing situation. In...
| Main Authors: | , , , |
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| Other Authors: | |
| Format: | Journal Article |
| Language: | English |
| Published: |
2021
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| Subjects: | |
| Online Access: | https://hdl.handle.net/10356/145810 |