Simultaneous profiling of optically smooth and rough surfaces using dual-wavelength interferometry
Interferometers are widely used in industry for surface profiling of microsystems. It can be used to inspect both smooth (reflective) and rough (scattering) surfaces in wide range of sizes. If the object surface is smooth, the interference between reference and object beam results in visible fringes...
| Main Authors: | , , |
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| Other Authors: | |
| Format: | Conference Paper |
| Language: | English |
| Published: |
2021
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| Subjects: | |
| Online Access: | https://hdl.handle.net/10356/146467 |