Rapid fabrication of complex nanostructures using room-temperature ultrasonic nanoimprinting

Rapid fabrication of complex nanostructures using room-temperature ultrasonic nanoimprinting

Despite its advantages of scalable process and cost-effectiveness, nanoimprinting faces challenges with imprinting hard materials (e.g., crystalline metals) at low/room temperatures, and with fabricating complex nanostructures rapidly (e.g., heterojunctions of metal and oxide). Herein, we report a r...

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Bibliographic Details
Main Authors: Ge, Junyu, Ding, Bin, Hou, Shuai, Luo, Manlin, Nam, Donguk, Duan, Hongwei, Gao, Huajian, Lam, Yee Cheong, Li, Hong
Other Authors: School of Mechanical and Aerospace Engineering
Format: Journal Article
Language:English
Published: 2021
Subjects:
Engineering::Mechanical engineering::Prototyping
Ultrasonic Embossing
Metal Nanoimprinting
Plasmonic Structure
Biosensing
Online Access:https://hdl.handle.net/10356/153146

Internet

https://hdl.handle.net/10356/153146

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