Fabrication of 1D and 2D gratings by interference lithography

Interference lithography (IL) is a simple method for fabricating periodic and quasi-periodic nanostructures that are spatially coherent over large areas for plasmonic/ photonic and biosensing applications. In this work, fabrication of one-dimensional (1D) and two-dimensional (2D) periodic arrays is...

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Bibliographic Details
Main Author: Chua, Xin Rong.
Other Authors: Wong Chee Cheong
Format: Final Year Project (FYP)
Language:English
Published: 2009
Subjects:
Online Access:http://hdl.handle.net/10356/15337