Deeply sub-wavelength non-contact optical metrology of sub-wavelength objects

Microscopes and various forms of interferometers have been used for decades in optical metrology of objects that are typically larger than the wavelength of light λ. Metrology of sub-wavelength objects, however, was deemed impossible due to the diffraction limit. We report the measurement of the phy...

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Bibliografske podrobnosti
Main Authors: Rendón-Barraza, Carolina, Chan, Eng Aik, Yuan, Guanghui, Adamo, Giorgio, Pu, Tanchao, Zheludev, Nikolay, I.
Drugi avtorji: School of Physical and Mathematical Sciences
Format: Journal Article
Jezik:English
Izdano: 2022
Teme:
Online dostop:https://hdl.handle.net/10356/154947