A novel retractable stiffener-based disk-shaped active compliant polishing tool
A novel active variable compliance polishing tool is proposed to improve the control over the area of contact and pressure distribution during polishing. This active compliance is achieved by employing a retractable stiffener-based design. This novel tool can provide a continuous range of compliance...
| Main Authors: | , , , |
|---|---|
| Other Authors: | |
| Format: | Journal Article |
| Language: | English |
| Published: |
2022
|
| Subjects: | |
| Online Access: | https://hdl.handle.net/10356/155325 |