Deposition and characterisation of carbon thin films via patented Off-Plane Double Bend FCVA deposition system

Deposition and characterisation of carbon thin films via patented Off-Plane Double Bend FCVA deposition system

In this project, carbon thin films that are deposited by Off-Plane Double Bend (OPDB) Filtered Cathodic Vacuum Arc (FCVA) system are characterised. By varying the substrate temperature and voltage bias of the FCVA system, different types of carbon thin film can be obtained. Tetrahedral amorphous car...

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Bibliographic Details
Main Author: Lee, Jin Zhou
Other Authors: Tay Beng Kang
Format: Final Year Project (FYP)
Language:English
Published: Nanyang Technological University 2022
Subjects:
Engineering::Electrical and electronic engineering::Microelectronics
Engineering::Electrical and electronic engineering::Semiconductors
Online Access:https://hdl.handle.net/10356/157402

Internet

https://hdl.handle.net/10356/157402

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