Practical reviews of exhaust systems operation in semiconductor industry
Scrubbers are widely used for air pollution treatment in semiconductor. Efficiency of waste gas treatment must be carefully maintained for environmental and health issue. However, due to the complex types of exhaust system and the needs of using chemicals with different characteristics at the same t...
| Main Authors: | , , , , , |
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| Other Authors: | |
| Format: | Conference Paper |
| Language: | English |
| Published: |
2022
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| Subjects: | |
| Online Access: | https://hdl.handle.net/10356/158452 |