Practical reviews of exhaust systems operation in semiconductor industry

Practical reviews of exhaust systems operation in semiconductor industry

Scrubbers are widely used for air pollution treatment in semiconductor. Efficiency of waste gas treatment must be carefully maintained for environmental and health issue. However, due to the complex types of exhaust system and the needs of using chemicals with different characteristics at the same t...

Bibliografski detalji
Glavni autori:	Li, Yuanzhe, Zhu, Yalin, Hao, Yu, Xiao, Peng, Dong, Zhili, Li, Xiang
Daljnji autori:	School of Materials Science and Engineering
Format:	Conference Paper
Jezik:	English
Izdano:	2022
Teme:	Engineering::Materials Scrubber Air Pollution Treatment Semiconductor Company Exhaust System Operation Practical Solutions
Online pristup:	https://hdl.handle.net/10356/158452

Slični predmeti

The modelling of venturi scrubbers/
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Wey Scrubbers /
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Effects of dust controls on respirable coal mine dust composition and particle sizes: case studies on auxiliary scrubbers and canopy air curtain
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Air-fuel ratios from exhaust gas analysis/
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