Ge-on-Si avalanche photodiodes with photon trapping nanostructures for sensing and optical quantum applications
High-sensitivity Ge/Si avalanche photodiodes (APDs) have recently gained attention for their application in sensing and optical communication due to their low cost and CMOS compatible process. However, compared to commercial III–V compound APDs, Ge/Si APDs usually suffer from the issue of relatively...
Main Authors: | , , , , , , |
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Other Authors: | |
Format: | Journal Article |
Language: | English |
Published: |
2023
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Subjects: | |
Online Access: | https://hdl.handle.net/10356/166601 |