Chemical mechanical polishing of germanium selectively grown on silicon
This report reviews the importance of the Chemical and Mechanical Planarization (CMP) process for photonics applications and discusses the various factors that affect the quality of CMP, and how to achieve optimality of the slurry recipe. Germanium-on-silicon (GOS) waveguides are fabricated for t...
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| Eará dahkkit: | |
| Materiálatiipa: | Final Year Project (FYP) |
| Giella: | English |
| Almmustuhtton: |
Nanyang Technological University
2023
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| Fáttát: | |
| Liŋkkat: | https://hdl.handle.net/10356/167639 |