Investigation of multilayer thin films using ellipsometry
Spectroscopic Ellipsometry (SE) is a powerful and universal optical technique for the investigation of optical properties of semiconductor thin films. It is an extremely sensitive measurement tool for the characterization of single layer thin film and even multilayer structures. This project focus...
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Format: | Final Year Project (FYP) |
Language: | English |
Published: |
2009
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Online Access: | http://hdl.handle.net/10356/16800 |