Investigation of multilayer thin films using ellipsometry

Spectroscopic Ellipsometry (SE) is a powerful and universal optical technique for the investigation of optical properties of semiconductor thin films. It is an extremely sensitive measurement tool for the characterization of single layer thin film and even multilayer structures. This project focus...

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Bibliographic Details
Main Author: He, Lining.
Other Authors: Rusli
Format: Final Year Project (FYP)
Language:English
Published: 2009
Subjects:
Online Access:http://hdl.handle.net/10356/16800