Structural and tribological behaviours of silicon doped amorphous carbon films

Structural and tribological behaviours of silicon doped amorphous carbon films

We report on the structural evolution and low-friction behaviour of silicon (Si) doped amorphous carbon (a-C) films. Si-doped a-C films were fabricated by controlling the magnetron Si target currents under an electron cyclotron resonance (ECR) plasma system. Structural analysis indicated that Si ato...

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Bibliographic Details
Main Authors: Sun, Kun, Sun, Mingjun, Chen, Cheng, Chen, Sicheng, Fan, Jinwei, Diao, Dongfeng
Other Authors: School of Electrical and Electronic Engineering
Format: Journal Article
Language:English
Published: 2023
Subjects:
Engineering::Electrical and electronic engineering
Doped Silicon
Amorphous Carbon
Online Access:https://hdl.handle.net/10356/171216

Internet

https://hdl.handle.net/10356/171216

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