Temperature, pressure, and humidity SAW sensor based on coplanar integrated LGS

Temperature, pressure, and humidity SAW sensor based on coplanar integrated LGS

This paper presents a surface acoustic wave (SAW) sensor based on coplanar integrated Langasite (LGS) that is fabricated using wet etching, high-temperature bonding, and ion beam etching (IBE) processes. The miniaturized multiparameter temperature‒pressure-humidity (TPH) sensor used the MXene@MoS2@G...

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Xehetasun bibliografikoak
Egile Nagusiak: Liang, Xiaorui, Zhang, Lei, Tan, Qiulin, Cheng, Wenhua, Hu, Dan, Li, Shuang, Jing, Lin, Xiong, Jijun
Beste egile batzuk: School of Materials Science and Engineering
Formatua: Journal Article
Hizkuntza:English
Argitaratua: 2023
Gaiak:
Engineering::Materials
Acoustic Waves
Etching
Sarrera elektronikoa:https://hdl.handle.net/10356/171520

Internet

https://hdl.handle.net/10356/171520

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