Deep-UV metalens for high resolusion laser direct writing lithography
Lithography is a crucial technology in semiconductor industry. Laser direct writing lithography is a maskless lithography technology, which uses laser to write the desired patterns directly on a target. The objective lens plays an important role in laser direct writing lithography, which focuses the...
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| Format: | Thesis-Master by Coursework |
| Language: | English |
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Nanyang Technological University
2024
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| Online Access: | https://hdl.handle.net/10356/173576 |