LabVIEW based automation to laser molecular beam epitaxy

The continuous advancement of the microelectronic technology, particularly on the shrinking dimensions in CMOS and MOSFET devices, has spurred significant improvements in epitaxy techniques over the few decades. To develop a coherent epitaxy system for facilitating improved research works, a highly...

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Bibliographic Details
Main Author: Teo, Janice Qin Yun.
Other Authors: Zhu Weiguang
Format: Final Year Project (FYP)
Language:English
Published: 2009
Subjects:
Online Access:http://hdl.handle.net/10356/17584