Atomic-level insight into process and mechanism of ion beam machining on aluminum optical surface

Atomic-level insight into process and mechanism of ion beam machining on aluminum optical surface

Polycrystalline Al workpieces go through a complex surface atom sputtering and surface/subsurface atom diffusion throughout the ion beam machining process that plays a critical role in determining machining quality of optical mirror surfaces. Here, we leverage molecular dynamics method for the first...

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Bibliographic Details
Main Authors: Du, Chunyang, Dai, Yifan, Hu, Hao, Guan, Chaoliang, Liu, Junfeng, Lai, Tao, Tian, Yuanyuan
Other Authors: School of Mechanical and Aerospace Engineering
Format: Journal Article
Language:English
Published: 2024
Subjects:
Engineering
Ion beam sputtering
Surface morphology
Online Access:https://hdl.handle.net/10356/176064

Internet

https://hdl.handle.net/10356/176064

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