Scanning inteferometer for characterization of piezoelectric thin films and MEMS devices
Microelectromechanical systems (MEMS) and nanoelectromechanical systems have been given much attention in recent years. Characterizations of piezoelectric materials are needed to analyze the properties of such materials. However, the piezoelectric properties of thin films have not been sufficiently...
| Main Author: | |
|---|---|
| Other Authors: | |
| Format: | Final Year Project (FYP) |
| Language: | English |
| Published: |
2009
|
| Subjects: | |
| Online Access: | http://hdl.handle.net/10356/17785 |