Wide-range, durable, and adaptable miniature pressure sensor based on planar capacitance
Capacitive pressure sensor (CPS) is widely used in the field of industrial equipment, because of the merits of fast dynamic response and high resolution. However, the traditional laminated CPS makes it difficult to achieve a wide detection limit in a small size, and this structure is susceptible to...
| Main Authors: | , , , , |
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| Other Authors: | |
| Format: | Journal Article |
| Language: | English |
| Published: |
2024
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| Subjects: | |
| Online Access: | https://hdl.handle.net/10356/179268 |