Wide-range, durable, and adaptable miniature pressure sensor based on planar capacitance

Wide-range, durable, and adaptable miniature pressure sensor based on planar capacitance

Capacitive pressure sensor (CPS) is widely used in the field of industrial equipment, because of the merits of fast dynamic response and high resolution. However, the traditional laminated CPS makes it difficult to achieve a wide detection limit in a small size, and this structure is susceptible to...

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Bibliographic Details
Main Authors: Liu, Shimin, Yuan, Bo, Yang, Lei, Chen, Sicheng, Guo, Yanjie
Other Authors: School of Electrical and Electronic Engineering
Format: Journal Article
Language:English
Published: 2024
Subjects:
Engineering
Miniature pressure sensor
Planar capacitance
Online Access:https://hdl.handle.net/10356/179268

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