Double-gated CNTFETs with Al2O3/Si3N4 as gate dielectrics

This report focuses on fabrication and investigation of double-gated Carbon Nanotube Field-Effect-Transistors (CNTFETs) in which both partial top gate and global back gate are fabricated on the same device. Two design structures were fabricated to compare improvements of high K dielectric material o...

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Bibliographic Details
Main Author: Fan, Yu
Other Authors: Zhang Qing
Format: Final Year Project (FYP)
Language:English
Published: 2009
Subjects:
Online Access:http://hdl.handle.net/10356/17999