Double-gated CNTFETs with Al2O3/Si3N4 as gate dielectrics

This report focuses on fabrication and investigation of double-gated Carbon Nanotube Field-Effect-Transistors (CNTFETs) in which both partial top gate and global back gate are fabricated on the same device. Two design structures were fabricated to compare improvements of high K dielectric material o...

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Detalles Bibliográficos
Autor principal: Fan, Yu
Otros Autores: Zhang Qing
Formato: Final Year Project (FYP)
Lenguaje:English
Publicado: 2009
Materias:
Acceso en línea:http://hdl.handle.net/10356/17999